Tip/Tilt Platforms for Mirrors, Optics | FSMs

Motorized Tip-Tilt Stages

Piezoelectric Tip-Tilt Stages

Piezo Tip-Tilt Mirrors

Hexapods

What are Precision Tip/Tilt Stages and Steering Mirrors Used For?

High resolution tip-tilt stages are used in optical applications to precisely adjust the angular position of mirrors, lenses, fibers, sensors, and laser beams. By providing fine rotation around two axes, they enable accurate beam steering, optical alignment, image stabilization, and compensation for drift or vibration. In photonics, microscopy, interferometry, laser processing, and free-space optical communication, highly accurate tip-tilt motion helps maintain optimal beam position and coupling efficiency. High-resolution tip-tilt stages are especially useful where small angular errors can reduce signal quality, measurement accuracy, or optical throughput. They support fast, repeatable alignment in both research systems, aerospace and automated industrial optical setups.

Fast Tip/Tilt Steering Mirror Platform with Voice-Coil Drives
		For Dynamic FSM Applications For Mirrors to 1" Diameter Optical Deflection Angle to 8° Voice-Coil Driven This highly dynamic laser steering mirror mount provides precise motion in two orthogonal axes. A compact 2-axis bench-top and OEM controller is also available (model C-413). NEW! Fast Steering Mirrors


Video: Fast Mirror Tilting Systems based on Piezo and Voice Coil Motors

A-523 Fast Z-Tip-Tilt Precision Air Bearing Table for Alignment
		High Dynamics and Speed: 1g Acceleration High Force / Load Ironless 3-phase linear motors Nanometer and Sub-Microradian Resolution Very Low Profile Clean Room Compatible Frictionless and Wear Free Can be combined with X-Y-Theta Stage to form low Profile 6-Axis Stage This unique Z-tip-tilt stage with air bearing guides and ironless, 3-phase linear motors combines high resolution, speed and load capacity in a very low profile unit. The 3-axis stage can also be combined with the A-361 X-Y-Theta Air Bearing Stage to form a very compact 6-axis unit for 6-DOF alignment tasks in optics, photonics, medical engineering and other mechatronics applications. Learn More! Air Bearing Table for Z/Tip/Tilt

Tip/Tilt Motorized Kinematic Mount with Nanometer-Precision Piezo-Motor Drives
		Superior Resolution & Repeatability Self-Locking Piezo Motor Drives - High Stability Additional Manual Control These high precision, compact tip/tilt kinematic mounts are designed for optica and mirrors. They feature very high resolution superior stability Spring preloading eliminates backlash. The piezo-motor ratchet drives allow ultra-high-resolution angular motion and are self-locking on power off. NEW! Tip/Tilt Motorized Kinematic Mounts

L-886 HIgh Precision Goniometer, Stackable with Common Pivot Point
Rotation range 10° Load capacity to 2 kg ExRepeatability to 35 µrad Can be combined for Theta-XY motion wiht common pivot point High resolution optical encoder More Information on Goniometers

High-Force Piezo-Motor Driven Tip/Tilt +Z Stage Concept
		Z, tip, tilt Nanopositioning Platform with 3 Integrated Drives (Parallel Kinematics Tripod Design) NEXLINE® Piezo-Walk Drive is Self Clamping, no Heat Generation at Rest Vacuum Compatible / Non-Magnetic Designs Feasible High Load Capacity 200 N High Precision with Integrated Incremental Sensors + Picometer Resolution Dithering Mode This high-force multi-axis stage is based on PI's patented NEXLINE® self-locking piezo motor drives. These high-precision linear drives were awarded the SEMI Technology Innovation Showcase Award. NEXLINE® technology combines the advantages of piezo class precision with the long travel ranges of linear motor technology. PDF Brochure \| Piezo Tip/Tilt Stage for Piezo Wafer Positioning

Non-Magnetic Piezo Hexapod Concept: Tip/Tilt + Rot-Z + XYZ 6-Axis Stage
Travel Ranges 10 mm Linear, 6° Rotation Large Clear Aperture 202 mm Non-Magnetic NEXLINE® Piezo-Walk Drive is Self Clamping, no Heat Generation at Rest Nanometer Resolution Low-Profile: 140 mm Height Only Parallel Kinematics for Better Multi-Axis Accuracy Up to 500 N Force Generation 6-axis parallel kinematics (Hexapod) with integrated NEXLINE® high-load piezo motor actuators, suitable for applications in strong magnetic fields More Information on 6-Axis Motion and Positioning Platforms / Hexapods PDF Brochure

P-562.6CD Tip-Tilt + XYZ + Rot-Z Piezo Flexure Stage: 6-Axis Nanopositioning System
		6 Motion Axes: Tip/Tilt, XYZ + Rot-Z 1 mrad Tilt Angle, to 200 µm Linear Range UHV Versions to 10^-9 hPa Parallel Kinematics / Metrology for Enhanced Responsiveness & Precision Capacitive Feedback for Highest Linearity / Stability Frictionless, High-Precision Flexure Guiding System Excellent Scan-Flatness 66x66mm Aperture Outstanding Lifetime Due to PICMA® Piezo Actuators This multi-axis piezo nanopositioning stage is one of the most advanced piezo systems currently available. Its parallel-kinematic design, where all piezo flexure drives act on the same moving platform, and sophisticated digital control algorithms (see E-712 digital piezo controller) make it possible to achieve highly precise coordinated motion in all degrees of freedom, with straightness & flatness in the low nanometer range. PDF Brochure \| 6-DOF Piezo Stage Datasheet

S-340 Piezo Tip / Tilt-Stage Mirror Platform; High-Dynamics for Mirrors and Optics with a Diameter of up to 100 mm (4")
20 nrad Resolution, Excellent Position Stability Optical Beam Deflection to 4 mrad Parallel Kinematics Design Provides Higher Precision, Stability & Dynamics No Polarization Rotation (Single Moving Platform & Fixed Pivot Point) Sub-millisec Response For Optics to 4" Ø Closed-Loop Option for Higher Linearity The S-340 tip/tilt piezo platform allows precision rotation in two orthogonal axes with a fixed pivot point. The parallel-kinematic differential drive enables outstanding angular stability over a wide temperature range. A variety of top platforms are available to achieve an optimum thermal adaptation to different mirror materials. Closed-loop and open-loop models are available. PDF Brochure \| S-340 Tip/Tilt Platform Datasheet / Order Info

S-331 Piezo Tip/Tilt Platform: High Dynamics & Large Angles
		Optical Beam Deflection to 14 mrad Parallel Kinematics Design for Enhanced Stability, Dynamics & Precision Position Servo-Control for High Positioning Stability Frictionless, High-Precision Flexure Guiding System System Combination with Digital Controllers for Highest Linearity The S-331 tip/tilt piezo-driven platform is designed for large angles and highest dynamics. Tip/Tilt Platform Datasheet / Order Info

S-312 Piezo Phase Shifter with 500 Picometers Resolution , Up to 8" Aperture, High Dynamics
High Resonant Frequency for Sub-Millisecond Response Time Up to 8" Aperture Mounts in any Orientation Piston Motion Range to 15 microns Piezo phase shifters are based on a piezo tripod drive. The very stiff and compact design provides sub-millisecond response times and sub-nm level resolution. Piston movement is up to 15 micrometers. Open- and closed-loop versions are available. Phase Shifter Datasheet / Order Info

Custom Single Axis Miniature Piezo Steering Mirror
		Optical Beam Deflection to 4.4mrad Open and Closed-Loop Versions Resolution to 50 nano radian Sub-Millisecond Response Backlash-Free Flexure Guiding System These miniature piezo tilt mirrors, provide optical beam deflection to 4.4 mrad, nanoradian-level resolution and sub-millisecond response times. PDF Brochure \| Overview

P-500 Series Piezo Z/Tip/Tilt Open Frame Nano-Positioning Platform
Z & Z-Tip/Tilt Versions Resolutions to 0.5 nanometers / 50 nano-radians Capacitive Feedback for Highest Linearity Closed-Loop Tilt Range to 2 milli-radians 200 microns in Z) Frictionless, High-Precision Flexure Guiding System PICMA® Ceramic Encapsulated Piezo Actuators for Outstanding Lifetime 66x66 mm Clear Aperture Parallel Kinematics & Metrology provides Enhanced Responsiveness & Multi-Axis Precision P-518, P-528 and P-558 are open-frame, piezo-driven Z/tip/tilt stages. The large clear aperture enables transmitted-light applications. The integrated piezo drives enable high dynamics and resolution, with motion to 240 microns and 2.4 milliradians, respectively and high resolution to 0.5 nanometers and 50 nano-radians. PDF Brochure \| Piezo Tip/Tilt Platform Datasheet / Order Info

P-541.Z Piezo Z & Z/Tip/Tilt Open Frame Nano-Positioning Platforms for Microscopy Applications
		Low Profile for Easy Integration: 16.5 mm; 80 x 80 mm Clear Aperture 2 Versions: Z and Z/Tip/Tilt 100 µm Travel Range, 1 mrad Tilt Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Choice of Sensors: Capacitive Sensors (Higher Performance) and Strain Gauge (Lower Cost) PICMA® Ceramic Encapsulated Piezo Actuators for Outstanding Lifetime Combination with Long-Travel M-686 Microscopy Stages P-541 Piezo-Z stages and Z/tip/tilt stages are optimized for light microscopy, nano-focus and metrology applications. The extremely low profile of only 16.5 mm, a large 80 x 80 mm aperture allow easy integration. XY scanning stages with the same footprint are also available. PDF Brochure \| Piezo- Tip/Tilt Stage Datasheet, Order Info

S-310 - S-316 Piezo Phase Shifter Z/Tip/Tilt Platform with Aperture
Parallel Kinematics Piezo Tripod Design for Enhanced Stability, Dynamics & Precision 3 Axis Motion with Optical Beam Deflection to 2.4 mrad and Piston Movement to 12 microns (phase shifter, optical filters) Sub-µrad Resolution, Sub-msec Response Times Open and Closed-Loop Versions Zero-Backlash High-Precision Flexure Guiding System 10 mm Clear Aperture These compact Z-positioners and Z-tip/tilt platforms are based on a parallel-kinematic piezo tripod design. They provide piston movement to 12 microns, tilt angles to 1.2 mrad (2.4 mrad optical beam deflection) and sub-millisecond response times. The tripod design provides excellent angular stability. PDF Brochure \| Piezo Piezo Phase Shifter Z/Tip/Tilt Platform Datasheet, Order Info

S-335 Large-Angle Piezo Tip/Tilt Mirror: High Speed and 70 mrad Deflection
		Miniature Tip/Tilt Mirror No Polarization Rotation (Coplanar Axes & Fixed Pivot Point) Optical Beam Deflection to 70 mrad (~ 4°) Factory Installed Mirror Millisecond Response, Nano-Rad Resolution Closed-loop Position Servo-Control for High Accuracy Zero-Backlash Precision Flexure Guides Parallel-Kinematics Design for Enhanced Dynamics, Stability & Accuracy This miniaturized tip/tilt mirror positioner/scanner provides very large tilt-angle record for piezo-flexure type two axis mirror platforms. Its high resonant frequency of 2kHz provides the basis for very high dynamics. Based on a sophisticated parallel-kinematics design with two coplanar, orthogonal axes and a fixed pivot point the system eliminates polarization rotation and facilitates integration into compact optical systems. PDF Brochure \| Piezo Tip/Tilt Mirror Datasheet / Order Info

S-330 Fast Piezo Tip/Tilt Steering Mirror Platform: High-Dynamics, Large-Angles
Optical Beam Deflection to 20 mrad (>1°) Resolution to 20 nrad, Excellent Position Stability Parallel-Kinematics Design for Enhanced Dynamics, Stability & Accuracy Sub-Millisecond Response For Optics to 50mm Ø Choice of Open and Closed-Loop Versions These piezo tip/tilt mirror platforms come with 3 different tilt ranges to 10 mrad (20 mrad optical deflection). The parallel-kinematics, differential direct drive system makes for very fast response and excellent stability and the two coplanar, orthogonal axes with and a fixed pivot point eliminates polarization rotation and facilitates integration into compact optical systems. PDF Brochure \| Piezo Tip/Tilt Platform Datasheet, Order Info

M-810 Miniature 6-Axis Stage, High Precision in a Small Package
Most-Compact Hexapod in the PI Portfolio Travel Ranges 40 x 40 x 13 mm, Rotation to 60 Degrees Load Capacity to 5 kg Resolution of a Single Strut 40 nm Min. Incremental Motion to 0.5 µm Repeatability up to ±0.5 µm Velocity to 10 mm/s With a platform diameter of only 10 cm the M-810 Hexapod is the most compact parallel-kinematics micropositioning system to date. In addition to positioning all six axes with high speed and accuracy, it allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command. This makes it ideal for all complex positioning tasks with restricted space. PDF Brochure \| 6-DOF Platform Details / Manuals, Order Info