Piezoelectric Z-Tip-Tilt Platforms for Optics, Nanopositioning by PI

P-500 family Z/Tip/Tilt piezo nanopositioning stage

Piezo Z/Tip/Tilt Open Frame Nano-Positioning Platform - P-500 Family

Z and Z-tip/tilt versions
Resolutions to 0.5 nanometers / 50 nrad
Capacitive feedback for highest linearity
Closed-loop tilt range to 2 mrad / 200 µm in Z
Frictionless, high-precision flexure guiding system
PICMA® ceramic encapsulated piezo actuators for outstanding lifetime
66 x 66 mm clear aperture
Parallel kinematics and metrology for enhanced responsiveness and multi-axis precision

P-518, P-528 and P-558 are piezo-driven Z/tip/tilt nanopositioning and scanning stages. The open-frame design enables transmitted-light applications. These high-resolution piezo stages provide linear motion to 240 µm and angular motion to 2.4 mrad with resolution to 0.5 nm and 50 nrad, respectively.

PDF Brochure | Piezo Z-Tip-Tilt Platform Datasheet / Manuals, Order Info

Low Profile Z/Tip/Tilt Open Frame Nano-Positioning Platforms for Microscopy Applications

Low profile for easy integration: 16.5 mm; 80 x 80 mm clear aperture
Two versions: Z and Z/tip/tilt
100 µm travel range, 1 mrad tilt
Parallel kinematics / metrology for enhanced responsiveness and multi-axis precision
Choice of capacitive sensors for higher performance or strain gauge sensors for lower cost
PICMA® ceramic encapsulated piezo actuators for outstanding lifetime
Combination with long-travel M-686 microscopy stages

P-541 Piezo-Z stages and Z/tip/tilt stages are optimized for light microscopy, nano-focus and metrology applications. The extremely low profile of only 16.5 mm and the large 80 x 80 mm aperture allow easy integration. XY scanning stages with the same footprint are also available.

PDF Brochure | Piezo Z-Tip-Tilt Platforms Details

High-Force Piezo-Motor Driven Tip/Tilt + Z Stage Concept

Z, tip, tilt nanopositioning platform with 3 integrated drives, parallel-kinematics tripod design
NEXLINE® PiezoWalk drive is self-clamping with no heat generation at rest
Vacuum compatible / non-magnetic designs feasible
High load capacity: 200 N
High precision with integrated incremental sensors and picometer-resolution dithering mode

This high-force multi-axis stage is based on PI's patented NEXLINE® self-locking piezo motor drives. These high-precision linear drives were awarded the SEMI Technology Innovation Showcase Award. NEXLINE® technology combines piezo-class precision with the long travel ranges of linear motor technology.

PDF Brochure | Z-Tip-Tilt Platform Product Details / Manuals

P-562.6CD Tip-Tilt + XYZ + Rot-Z Piezo Flexure Stage: 6-Axis Nanopositioning System

6 motion axes: tip/tilt, XYZ + Rot-Z
1 mrad tilt angle, to 200 µm linear range
UHV versions to 10^-9 hPa
Parallel kinematics / metrology for enhanced responsiveness and precision
Capacitive feedback for highest linearity and stability
Frictionless, high-precision flexure guiding system
Excellent scan flatness
66 x 66 mm aperture
Outstanding lifetime due to PICMA® piezo actuators

This multi-axis piezo nanopositioning stage is one of the most advanced piezo systems currently available. Its parallel-kinematic design, where all piezo flexure drives act on the same moving platform, and sophisticated digital control algorithms make it possible to achieve highly precise coordinated motion in all degrees of freedom, with straightness and flatness in the low nanometer range. More on additional piezo nano-transducers with nano precision resolution.

PDF Brochure | 6-DOF Stage Online Datasheet / Manuals, Order Info

Z/Tip/Tilt Stages with Piezo Drives and Flexure Precision

Piezoelectric Tip/Tilt Stage Types

Motorized Tip-Tilt Stages

Piezoelectric Tip-Tilt Stages

Piezo Tip-Tilt Mirrors

Hexapods