Tip/Tilt Platforms, Stages, Mirrors



Motorized Tip-Tilt Stages

Tip/Tilt Stage

Piezoelectric Tip-Tilt Stages


Piezo Z and Z/Tip/Tilt Stage
Piezo Tip-Tilt Mirrors
Piezo Tip/Tilt-Platform


      Hexapods



M-041 - M-044 Tip/Tilt Stage Piezo Drive Option for Nanometer Precision

Tip/Tilt Stage
  • Superior Resolution & Repeatability to Goniometers
  • One- & Two-Axis Versions
  • Zero Backlash
  • Optional Piezo Drives for High-Resolution Tracking & Scanning
  • Manual and DC-Motor Drives
  • Compatible with Leading Industrial Motion Controllers

These one- and two-axis tip/tilt positioners are designed for small loads and feature resolution and repeatability superior to that of goniometric cradles. Spring preloading eliminates backlash. Versions with piezo translators allow ultra-high-resolution dynamic scanning and tracking.

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M-833 θY, XZ Stage: Parallel Kinematic Tripod / Goniometer


  • Goniometer Z Stage with Freely Selectable Pivot Point
  • Travel Ranges ▒25 mm / ▒25 mm / ▒30░
  • Load Capacity to 4 kg
  • Min. Incremental Motion to 0.1 Ám
  • ActiveDrive Servo Motors
  • Compact Design with Parallel Kinematics


The parallel-kinematics tripod is designed for precision positioning, offering elevation, translation and tilt motion around the (horizontal) y-axis, with a user-defined pivot point

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Goniometer Stage





N-510 High-Force Piezo-Motor Driven Tip/Tilt +Z Stage

High-Force NEXLINE« Z/Tip/Tilt Stage
  • Z, tip, tilt Nanopositioning Platform with 3 Integrated Drives (Parallel Kinematics Tripod Design)
  • NEXLINE« Piezo-Walk Drive is Self Clamping, no Heat Generation at Rest
  • Vacuum Compatible / Non-Magnetic Designs Feasible
  • High Load Capacity 200 N
  • High Precision with Integrated Incremental Sensors + Picometer Resolution Dithering Mode

This high-force multi-axis stage is based on PI's patented NEXLINE« self-locking piezo motor drives. These high-precision linear drives were awarded the SEMI Technology Innovation Showcase Award. NEXLINE« technology combines the advantages of piezo class precision with the long travel ranges of linear motor technology.

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N-515K Non-Magnetic Piezo Hexapod Tip/Tilt + Rot-Z + XYZ 6-Axis Stage


  • Travel Ranges 10 mm Linear, 6░ Rotation
  • Large Clear Aperture 202 mm
  • Non-Magnetic NEXLINE« Piezo-Walk Drive is Self Clamping, no Heat Generation at Rest
  • Nanometer Resolution
  • Low-Profile: 140 mm Height Only
  • Parallel Kinematics for Better Multi-Axis Accuracy
  • Up to 500 N Force Generation


6-axis parallel kinematics (Hexapod) with integrated NEXLINE« high-load piezo motor actuators, suitable for applications in strong magnetic fields

More Hexapods

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Non-Magnetic Piezo Hexapod





P-562.6CD Tip-Tilt + XYZ + Rot-Z Piezo Flexure Stage: 6-Axis Nanopositioning System

P-915 K Low Cost XY Piezo Nanopositioning Stage
  • 6 Motion Axes: Tip/Tilt, XYZ + Rot-Z
  • 1 mrad Tilt Angle, to 200 Ám Linear Range
  • UHV Versions to 10-9 hPa
  • Parallel Kinematics / Metrology for Enhanced Responsiveness & Precision
  • Capacitive Feedback for Highest Linearity / Stability
  • Frictionless, High-Precision Flexure Guiding System
  • Excellent Scan-Flatness
  • 66x66mm Aperture
  • Outstanding Lifetime Due to PICMA« Piezo Actuators

This multi-axis piezo nanopositioning stage is one of the most advanced piezo systems currently available. Its parallel-kinematic design, where all piezo flexure drives act on the same moving platform, and sophisticated digital control algorithms (see E-712 digital piezo controller) make it possible to achieve highly precise coordinated motion in all degrees of freedom, with straightness & flatness in the low nanometer range.

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S-340 Piezo Tip / Tilt-Stage Mirror Platform; High-Dynamics for Mirrors and Optics with a Diameter of up to 100 mm (4")


  • 20 nrad Resolution, Excellent Position Stability
  • Optical Beam Deflection to 4 mrad
  • Parallel Kinematics Design Provides Higher Precision, Stability & Dynamics
  • No Polarization Rotation (Single Moving Platform & Fixed Pivot Point)
  • Sub-millisec Response
  • For Optics to 4" ě
  • Closed-Loop Option for Higher Linearity

The S-340 tip/tilt piezo platform allows precision rotation in two orthogonal axes with a fixed pivot point. The parallel-kinematic differential drive enables outstanding angular stability over a wide temperature range. A variety of top platforms are available to achieve an optimum thermal adaptation to different mirror materials. Closed-loop and open-loop models are available.

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S-340 Steering Mirror





S-323 Piezo Tip/Tilt + Z Platform: High Dynamics & Stability Piezo System with Direct Metrology

S-323 Piezo Z/Tip/Tilt Stage Platform
  • Optical Beam Deflection to 6 mrad
  • Parallel Kinematics Piezo Tripod Design for Enhanced Stability, Dynamics & Precision
  • 0.05 Árad Resolution
  • Position Servo-Control with Capacitive Sensors for High Positioning Stability
  • Frictionless, High-Precision Flexure Guiding System
  • System Combination with Digital Controllers for Highest Linearity

The S-323 Z/tip/tilt piezo-driven platform is based on a parallel-kinematics tripod-design. It integrates capacitive sensors for higher resolution and stability.

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S-303 Tip Tilt Piezo Phase Shifter, Highest Dynamics and Stability with Capacitive Feedback Sensor


  • 25 kHz Resonant Frequency for Microsecond Response Time
  • Better than 100 Picometer Resolution
  • Mounts in any Orientation
  • Capacitive Sensor Option for Highest Linearity and Stability
  • Invar Option for Highest Thermal Stability
  • Aperture with Open-Loop Versions
  • Piston Motion Range to 3 microns
  • Compact Design: ě 30mm x 10mm


S-303 piezo phase shifters are based on a piezo tripod drive. The very stiff and compact design provides microsecond response times and angstrom level resolution. Piston movement is up to 3 Ám. Open- and closed-loop versions are available.

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S-303 Phase Shifters





S-224 & S-226 Miniature Piezo Mirror Tilter

Piezo Tilt-Mirror
  • Optical Beam Deflection to 4.4mrad
  • Open and Closed-Loop Versions
  • Resolution to 50 nano radian
  • Sub-Millisecond Response
  • Backlash-Free Flexure Guiding System

S-224/S-226 miniature piezo tilt mirrors, provide optical beam deflection to 4.4 mrad, nanoradian-level resolution and sub-millisecond response times. They are equipped with with a ě15x4mm BK7 glass mirror.

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P-500 Series Piezo Z/Tip/Tilt Open Frame Nano-Positioning Platform


  • Z & Z-Tip/Tilt Versions
  • Resolutions to 0.5 nanometers / 50 nrad
  • Capacitive Feedback for Highest Linearity
  • Closed-Loop Tilt Range to 2 mrad (200 Ám in Z)
  • Frictionless, High-Precision Flexure Guiding System
  • PICMA« Ceramic Encapsulated Piezo Actuators for Outstanding Lifetime
  • 66x66 mm Clear Aperture
  • Parallel Kinematics & Metrology provides Enhanced Responsiveness & Multi-Axis Precision


P-518, P-528 and P-558 are piezo-driven, Z/tip/tilt nanopositioning and scanning stages. are open-frame, high-resolution, piezo-driven stages providing motion to 240 Ám and 2.4 mrad with resolution to 0.5 nm and 50 nrad. The large clear aperture enables transmitted-light applications.

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Z/Tip/Tilt Stage





P-541.Z Piezo Z & Z/Tip/Tilt Open Frame Nano-Positioning Platforms for Microscopy Applications

Piezo Z and Z/Tip/Tilt Stage
  • Low Profile for Easy Integration: 16.5 mm; 80 x 80 mm Clear Aperture
  • 2 Versions: Z and Z/Tip/Tilt
  • 100 Ám Travel Range, 1 mrad Tilt
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Choice of Sensors: Capacitive Sensors (Higher Performance) and Strain Gauge (Lower Cost)
  • PICMA« Ceramic Encapsulated Piezo Actuators for Outstanding Lifetime
  • Combination with Long-Travel M-686 Microscopy Stages

P-541 Piezo-Z stages and Z/tip/tilt stages are optimized for light microscopy, nano-focus and metrology applications. The extremely low profile of only 16.5 mm, a large 80 x 80 mm aperture allow easy integration. XY scanning stages with the same footprint are also available.

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S-310 - S-316 Piezo Phase Shifter Z/Tip/Tilt Platform with Aperture


  • Parallel Kinematics Piezo Tripod Design for Enhanced Stability, Dynamics & Precision
  • 3 Axis Motion with Optical Beam Deflection to 2.4 mrad and Piston Movement to 12 microns (phase shifter, optical filters)
  • Sub-Árad Resolution, Sub-msec Response Times
  • Open and Closed-Loop Versions
  • Zero-Backlash High-Precision Flexure Guiding System
  • 10 mm Clear Aperture

These compact Z-positioners and Z-tip/tilt platforms are based on a parallel-kinematic piezo tripod design. They provide piston movement to 12 microns, tilt angles to 1.2 mrad (2.4 mrad optical beam deflection) and sub-millisecond response times. The tripod design provides excellent angular stability.

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Piezo Z/Tip/Tilt Scanner





S-334 Large-Angle Piezo Tip/Tilt Mirror: High Speed and 120 mrad Deflection

Miniature Piezo Tip/Tilt-Stage Steering Mirror
  • Miniature Tip/Tilt Mirror
  • No Polarization Rotation (Coplanar Axes & Fixed Pivot Point)
  • Optical Beam Deflection to 120 mrad (~ 6.8░)
  • Factory Installed Mirror
  • Millisecond Response, Resolution to 0.2 Árad
  • Closed-loop Position Servo-Control for High Accuracy
  • Zero-Backlash Precision Flexure Guides
  • Parallel-Kinematics Design for Enhanced Dynamics, Stability & Accuracy

This miniaturized tip/tilt mirror positioner/scanner sets the tilt-angle record for two axis piezo mirrors. Based on a sophisticated parallel-kinematics design with two coplanar, orthogonal axes and a fixed pivot point the system eliminates polarization rotation and facilitates integration into compact optical systems.

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S-330 Fast Piezo Tip/Tilt Steering Mirror Platform: High-Dynamics, Large-Angles


  • Optical Beam Deflection to 20 mrad (>1░)
  • Resolution to 20 nrad, Excellent Position Stability
  • Parallel-Kinematics Design for Enhanced Dynamics, Stability & Accuracy
  • Sub-Millisecond Response
  • For Optics to 50mm ě
  • Choice of Open and Closed-Loop Versions

These piezo tip/tilt mirror platforms come with 3 different tilt ranges to 10 mrad (20 mrad optical deflection). The parallel-kinematics, differential direct drive system makes for very fast response and excellent stability and the two coplanar, orthogonal axes with and a fixed pivot point eliminates polarization rotation and facilitates integration into compact optical systems.

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Piezo Tip/Tilt-Platform




M-810 Miniature 6-Axis Stage, High Precision in a Small Package


  • Most-Compact Hexapod in the PI Portfolio
  • Travel Ranges 40 x 40 x 13 mm, Rotation to 60 Degrees
  • Load Capacity to 5 kg
  • Resolution of a Single Strut 40 nm
  • Min. Incremental Motion to 0.5 Ám
  • Repeatability up to ▒0.5 Ám
  • Velocity to 10 mm/s


With a platform diameter of only 10 cm the M-810 Hexapod is the most compact parallel-kinematics micropositioning system to date. In addition to positioning all six axes with high speed and accuracy, it allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command. This makes it ideal for all complex positioning tasks with restricted space.

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Miniature 6-Axis Stage




Tip/Tilt Stages Catalog